AMHS
EFEM
- Fast conversion 8”/12” wafer
(use adapter fixture, compatible with FOUP, FOSB and Cassette) - Dual-arm robot to improve operational speed
- Class 1 Cleanliness
Equipped with FFU (Fan Filter Unit) and ionizer - High speed IOSS WID120 barcode reader
(Compatible with OCR, 2D code) - Std 2 load port, expandable up to 4 load ports
- Integrable with AOI
- SECS/GEM / E84 for AMHS
| Items | Specification |
|---|---|
|
Wafer size |
8” and 12” |
|
UPH |
300 wafer (with OCR read) / 450 wafer（Without OCR read） |
|
Integration capabilities |
✔ AOI ✔ AGV ✔ IAR ✔ OHT ✔ Others wafer processing equipment |
|
Communication protocol |
SECS GEM / E84 |
|
Cleanliness |
Std Class 1000, Option Class 10/100 |
|
OCR reader |
✔ |
|
Utility requirements |
380 VAC 3 phase ±５% 50 Hz, CDA ≥0.5 MPa |
|
Dimension |
1750mm (L) x 1325mm (W) x 2300mm (H) |